• 专利标题:   Method for manufacturing field effect transistor for semiconductor device, involves changing liquid drop number and/or liquid drop interval according to predetermined condition for each portion forming FET on substrate.
  • 专利号:   JP2022028624-A
  • 发明人:   TANAKA R, MURASE S
  • 专利权人:   TORAY IND INC
  • 国际专利分类:   H01L021/336, H01L021/822, H01L051/05, H01L051/30
  • 专利详细信息:   JP2022028624-A 16 Feb 2022 H01L-021/336 202234 Pages: 34 Japanese
  • 申请详细信息:   JP2022028624-A JP122174 27 Jul 2021
  • 优先权号:   JP131461

▎ 摘  要

NOVELTY - The method involves inkjet-coating a semiconductor material such as organic semiconductor, carbon nanotube, graphene, fullerene on the surface of a substrate. The inkjet coating is carried out while moving an inkjet head to the substrate. The liquid drop number and/or liquid drop interval are changed in accordance with a predetermined condition to manufacture a field effect type transistor (FET). The FET is formed with a gate electrode (3), a source electrode (8) and a drain electrode (9). The liquid drop number and/or liquid drop interval are changed according to a predetermined condition for each portion forming FET on substrate. USE - Method for manufacturing field effect transistor (FET) for semiconductor device. ADVANTAGE - The method enables efficiently manufacturing the FET with desired characteristics and reducing size of the semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor device. Gate electrode (3) Source electrode (8) Drain electrode (9) Droplet (12) Channel region (14)