1. 平台首页
  2. 国际专利信息
  • 专利标题:   Manufacturing multilayer graphene e.g. suspended or deposited multilayer graphene used for device e.g. sensor involves depositing graphene monolayer having protective layer on top on sample containing another graphene monolayer.
  • 专利号:   EP3367423-A1, US2018247725-A1
  • 发明人:   ZURUTUZA ELORZA A, CENTENO PEREZ A, PESQUERA RODRIGUES A, ZURUTUZA E A, CENTENO P A, PESQUERA R A
  • 专利权人:   GRAPHENEA SA, GRAPHENEA SA
  • 国际专利分类:   B82Y030/00, B82Y040/00, C30B029/02, H01L021/02, H01L029/16, B32B037/00, B32B009/00, C01B032/184, C23F001/14, H01B001/04, H01B013/00, H01B005/14
  • 专利详细信息:   EP3367423-A1 29 Aug 2018 H01L-021/02 201861 Pages: 24 English
  • 申请详细信息:   EP3367423-A1 EP382099 28 Feb 2017
  • 优先权号:   EP382099

▎ 摘　　要

NOVELTY - A multilayer graphene is manufactured by depositing 1st graphene monolayer (21) having protective layer (41) on top on sample containing 2nd graphene monolayer (20) grown on metal foil (10), attaching to metal foil a 1st frame (51) having substrate and thermal release adhesive polymer layer, removing or detaching metal foil, depositing the stack formed by protective layer, 1st graphene monolayer, 2nd graphene monolayer and 1st frame on sample containing graphene monolayer grown on metal foil, removing 1st frame, attaching to metal foil another frame having substrate and thermal release adhesive polymer layer, removing or detaching metal foil, and repeating stacking layers of graphene to form stack of multilayer graphene. USE - Manufacture of multilayer graphene e.g. suspended multilayer graphene or deposited multilayer graphene used for device e.g. nanoelectromechanical (NEMs) or microelectromechanical (MEMs) sensor or transparent electrode for display or organic or inorganic LED (all claimed). ADVANTAGE - Uniform multilayer graphene is obtained. Multilayer graphene can be suspended on cavities as well as on water-soluble substrates, allowing drying and manipulating multilayer graphene before transferring. Multilayer graphene has lower impurity and mechanical defects. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) obtaining multilayer graphene which involves depositing 1st graphene monolayer (21) having protective layer (41) on top on sample containing 2nd graphene monolayer (20) grown on metal foil (10), attaching to protective layer 1st frame (51) and attaching to metal foil 2nd frame (52) in which frames contain substrate and thermal release adhesive polymer layer, sealing 1st and 2nd graphene monolayers by pressing 1st and 2nd frames against each other, in such a way that distance between graphene monolayers is minimized and graphene monolayers become totally surrounded by outer perimeter of frames, removing or detaching metal foil while sealing of 1st and 2nd graphene monolayers prevents impurities from damaging 1st and 2nd graphene monolayers; and (2) device comprising suspended or deposited multilayer graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the frame in which border of each frame has been squashed against each other to seal the graphene layers. Metal foil (10) 2nd graphene monolayer (20) 1st graphene monolayer (21) Protective layer (41) 1st frame (51) 2nd frame (52)