▎ 摘　　要

NOVELTY - Chemical mechanical polishing solution comprises metal corrosion inhibitor, accelerator, oxidizing agent, nonionic surfactant, complexing agent and ionized water, where the accelerator includes carbon fiber powder, graphene powder and bioflavonoid. USE - Used as chemical mechanical polishing solution. ADVANTAGE - The polishing rate is improves by the carbon fiber powder in accelerator, the chemical mechanical polishing solution is reduces graphene powder and bioflavonoids in accelerator, the components of the polishing solution has better coordinated, polishing rate is greatly increased, and the mechanical polishing solution is more safe to use, has better use effect.