• 专利标题:   Silicon substrate aluminum oxide gate di-electric dual-gate graphene transistor, has silicon substrate provided with graphene channel, gate electrodes, Aluminum sulfate Trioxygen gate dielectric layer and carbonization layer.
  • 专利号:   CN103811556-A, CN103811556-B
  • 发明人:   HU Y, LEI T, ZHANG Y, GUO H, ZHAO Y, HUANG H
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   H01L021/336, H01L029/10, H01L029/51, H01L029/78
  • 专利详细信息:   CN103811556-A 21 May 2014 H01L-029/78 201447 Pages: 13 Chinese
  • 申请详细信息:   CN103811556-A CN10060321 21 Feb 2014
  • 优先权号:   CN10060321

▎ 摘  要

NOVELTY - The transistor has a silicon substrate provided with a graphene channel, gate electrodes, an aluminum sulfate Trioxygen gate dielectric layer, a 3C-Silicon carbide epitaxial layer and a carbonization layer. A side part of the graphene channel is equipped with the gate electrode, where width and length of the graphene channel is about in range of 40nm-4um and 35 to 600nm. The graphene channel is provided with the gate electrode. USE - Silicon substrate aluminum oxide gate di-electric dual-gate graphene transistor. ADVANTAGE - The transistor has high carrier mobility effect and better scattering effect property. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a silicon substrate aluminum oxide gate di-electric dual-gate graphene transistor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a silicon substrate aluminum oxide gate di-electric dual-gate graphene transistor.