• 专利标题:   Gas sensor e.g. carbon nanotube (CNT) gas sensor has graphene film that is provided in contact with upper electrode and is provided with network structure which is mutually connected with several armchair-type graphene nano ribbons.
  • 专利号:   JP2016090510-A, JP6394301-B2
  • 发明人:   YAMAGUCHI J, SATO S
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   G01N027/12
  • 专利详细信息:   JP2016090510-A 23 May 2016 G01N-027/12 201638 Pages: 14 English
  • 申请详细信息:   JP2016090510-A JP228220 10 Nov 2014
  • 优先权号:   JP228220

▎ 摘  要

NOVELTY - The gas sensor (30) has a substrate (21) and a graphene film (13) that is positioned above the substrate. An upper electrode (12a,12b) that is provided in contact with the graphene film. The graphene film is provided with a network structure which is mutually connected with several armchair-type graphene nano ribbons. The edge of the graphene nano ribbon is modified by chlorine, fluorine, hydroxide, and ammonia and methyl group. A lower electrode (24) is positioned above the substrate. USE - Gas sensor e.g. carbon nanotube (CNT) gas sensor. ADVANTAGE - The specific gas type is selectively and accurately detected by the gas sensor by controlling the polarity of GNR using magnitude correlation with the work function (WM) of the metal film. The ppb level of the gas molecule is detected with a favorable sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the manufacturing method of gas sensor. Upper electrode (12a,12b) Graphene film (13) Substrate (21) Lower electrode (24) Gas sensor (30)