▎ 摘 要
NOVELTY - The gas sensor (30) has a substrate (21) and a graphene film (13) that is positioned above the substrate. An upper electrode (12a,12b) that is provided in contact with the graphene film. The graphene film is provided with a network structure which is mutually connected with several armchair-type graphene nano ribbons. The edge of the graphene nano ribbon is modified by chlorine, fluorine, hydroxide, and ammonia and methyl group. A lower electrode (24) is positioned above the substrate. USE - Gas sensor e.g. carbon nanotube (CNT) gas sensor. ADVANTAGE - The specific gas type is selectively and accurately detected by the gas sensor by controlling the polarity of GNR using magnitude correlation with the work function (WM) of the metal film. The ppb level of the gas molecule is detected with a favorable sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the manufacturing method of gas sensor. Upper electrode (12a,12b) Graphene film (13) Substrate (21) Lower electrode (24) Gas sensor (30)