• 专利标题:   Temperature difference control uniform glue developing and heating unit, has soaking plate body divided into tray upper surface plate, where upper surface of tray upper surface plate is fixed with high precision temperature sensor.
  • 专利号:   CN213991050-U
  • 发明人:   LIU S
  • 专利权人:   LIU S
  • 国际专利分类:   H05B003/14, H05B003/36
  • 专利详细信息:   CN213991050-U 17 Aug 2021 H05B-003/14 202170 Pages: 6 Chinese
  • 申请详细信息:   CN213991050-U CN22451162 29 Oct 2020
  • 优先权号:   CN22451162

▎ 摘  要

NOVELTY - The utility model claims a temperature difference control uniform glue developing heating unit, comprising a soaking plate body; the soaking plate body is divided into a tray upper surface plate, a graphene uniform temperature layer, an insulating heat conducting clapboard, an interlayer heating circuit and a bottom insulating pressing plate; the upper surface plate of the tray, a graphene uniform temperature layer, an insulating heat conducting clapboard; the interlayer heating circuit and the bottom insulating pressing plate are orderly set from top to bottom; the surface of the upper surface plate of the tray is a wafer heating surface; the surface of the upper surface plate of the tray upper surface is fixed high precision a temperature sensor. The temperature difference controls the uniform glue developing and heating unit to obviously improve the uniform heating effect of the hot disc.