• 专利标题:   Method for preparing hole transport layer useful in crystal silicon solar cell involves etching Nafion film on surface of graphene mixed film using plasma enhanced chemical vapor deposition and plasma technology, and exposing graphene film.
  • 专利号:   CN113410335-A, CN113410335-B
  • 发明人:   YU W, LIU L, HUANG Y, JIA L, SHI X, LIU X, LU W, CONG R
  • 专利权人:   UNIV HEBEI
  • 国际专利分类:   H01L031/18, H01L031/0445, C23C016/26, C23C016/50, C23C016/56
  • 专利详细信息:   CN113410335-A 17 Sep 2021 H01L-031/18 202185 Pages: 13 Chinese
  • 申请详细信息:   CN113410335-A CN10671836 17 Jun 2021
  • 优先权号:   CN10671836

▎ 摘  要

NOVELTY - The method comprises growing a layer of silicon oxide layer on the surface of the crystal silicon substrate, using plasma enhanced chemical vapor deposition method to insitu deposit a layer of graphene film on the surface of the silicon oxide layer, coating Nafion (RTM: Sulfonated tetrafluoroethylene based fluoropolymer-copolymer)solution on the surface of the graphene film, annealing at 70-150 degrees C, forming graphene mixed film mixed with Nafion (RTM: Sulfonated tetrafluoroethylene based fluoropolymer-copolymer) film on the graphene film, using plasma enhanced chemical vapor deposition and plasma technology to etch the Nafion (RTM: Sulfonated tetrafluoroethylene based fluoropolymer-copolymer)film of graphene mixed film surface, and exposing the graphene film to obtain the hole transport layer. USE - Method for preparing hole transport layer, which is useful in crystal silicon solar cell. ADVANTAGE - The method: realizes chemical doping of the graphene film; improves mixed film work function; ensures conductivity of the film; improves photoelectric conversion efficiency of the graphene mixed film hole transport layer crystal silicon solar battery.