• 专利标题:   Method for manufacturing large-area continuous single-layer graphene film, involves carrying out electrochemical polishing for removing impurities on substrate, and carrying out selective etching under condition of second carbon source flow to obtain large-area continuous single-layer graphene film.
  • 专利号:   CN114684813-A, CN114684813-B
  • 发明人:   LIU Y, ZHANG J, YAO W, WU B
  • 专利权人:   CHINESE ACAD SCI CHEM INST
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN114684813-A 01 Jul 2022 C01B-032/186 202267 Chinese
  • 申请详细信息:   CN114684813-A CN11576672 28 Dec 2020
  • 优先权号:   CN11576672

▎ 摘  要

NOVELTY - The method involves carrying out a surface treatment electrochemical polishing for removing impurities on a substrate. Chemical vapor deposition process is utilized to carry out growth of graphene under the condition of first carbon source flow so as to obtain a multilayer graphene film. Selective etching is carried out under the condition of second carbon source flow to obtain a large-area continuous single-layer graphene film, where the carbon source flow is greater than the second carbon source flow. USE - Method for manufacturing large-area continuous single-layer graphene film (claimed). ADVANTAGE - The method enables utilizing two-step carbon source supply, first high carbon source grows multi-layer graphene large-area thin film, maintaining long-term supply of small carbon source and preferentially etching multi-layer area so that a large-area continuous single-layer graphene film is obtained. DESCRIPTION OF DRAWING(S) - The drawing shows a graph representing method for manufacturing large-area continuous single-layer graphene film. (Drawing includes non-English language text).