• 专利标题:   Terahertz detector based on graphene-based field effect transistor used in military and civil application, has graphene channel layer which is formed on metal electrode layer, covers electrode array and source and drain electrodes.
  • 专利号:   CN106129135-A, CN106129135-B
  • 发明人:   WANG J, MOU W, HUANG Z, GOU J, JIANG Y
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY, UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L031/0224, H01L031/0232, H01L031/028, H01L031/0352, H01L031/113, H01L031/18
  • 专利详细信息:   CN106129135-A 16 Nov 2016 H01L-031/0224 201682 Pages: 8 Chinese
  • 申请详细信息:   CN106129135-A CN10576141 20 Jul 2016
  • 优先权号:   CN10576141

▎ 摘  要

NOVELTY - The detector has a metal electrode layer (13) which is formed on an insulating layer (12), and comprises a metal electrode array. The source and drain electrodes (132,133) are positioned on both sides of metal electrode array. The metal electrode array comprises several periodically spaced metal electrodes. The source, drain and metal electrodes (131) having the same thickness. A graphene channel layer (14) is formed on the metal electrode layer, completely covers the metal electrode array and covers the source and drain electrodes. USE - Terahertz detector based on graphene-based field effect transistor used in military and civil application. ADVANTAGE - The absorption rate of the terahertz radiation of the detector is improved, and the room temperature sped of the detector is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for the fabrication of terahertz detectors. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the terahertz detector based on graphene field effect transistor. Insulating layer (12) Metal electrode layer (13) Graphene channel layer (14) Metal electrode (131) Source and drain electrodes (132,133)