▎ 摘 要
NOVELTY - Manufacture of carbon structure involves (A) supplying source gas-containing a carbon compound to a catalyst, growing a carbon structure by chemical vapor deposition, and (B) supplying a reactive gas comprising 1-5C compound including a hydroxyl group and/or an aldehyde group in the reaction waste gas which is generated in step (A). USE - Manufacture of carbon structure e.g. carbon nanotubes and graphene (all claimed). ADVANTAGE - The method enables efficient manufacture of carbon structure with high quality, excellent electroconductivity, thermal conductivity, and mechanical characteristics, and suppressed generation of carbon-type by-products. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacturing apparatus (100) of carbon structures, which consists of growth furnace (3) which supplies the source gas-containing a carbon compound to a catalyst, growing the carbon structure by CVD, and a reactive gas supply unit which supplies a reactive gas-containing a 1-5C compound containing hydroxyl group and/or an aldehyde group to a reaction exhaust gas which is generated in the growth furnace. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the manufacturing apparatus of carbon structures. Inlet port (1) Formation unit (2) Growth unit (3) Cooling unit (4) Exit purge unit (5) Conveyance unit (6) Connection components (7,8,9) Base material (20) Manufacturing apparatus (100) Gas-mixing prevention unit (101,102,103)