• 专利标题:   Preparing graphene carbon nanotube composite film comprises e.g. using atomic layer deposition to deposit metal catalytic layer on surface of substrate; and depositing carbon nanotube nano film on surface of metal catalytic layer.
  • 专利号:   CN112538611-A, CN112538611-B
  • 发明人:   XIA Y, ZHUO E, ZHANG Y, YE L
  • 专利权人:   BEIHAI HUIKE PHOTOELECTRIC TECHNOLOGY CO, HKC CO LTD
  • 国际专利分类:   B82Y040/00, C23C016/18, C23C016/26, C23C016/455, H01L027/12
  • 专利详细信息:   CN112538611-A 23 Mar 2021 C23C-016/26 202134 Pages: 13 Chinese
  • 申请详细信息:   CN112538611-A CN11391307 02 Dec 2020
  • 优先权号:   CN11391307

▎ 摘  要

NOVELTY - Preparing graphene carbon nanotube composite film comprises using atomic layer deposition to deposit a metal catalytic layer on the surface of the substrate; depositing a carbon nanotube nano film on the surface of the metal catalytic layer by atomic layer deposition, and partially exposing the metal catalytic layer on surface of the carbon nanotube nano film; depositing a graphene nano film on the surface of the carbon nanotube nano film by using an atomic layer deposition process, removing the metal catalyst layer with catalyst layer remover, and cleaning to obtain graphene carbon nanotube composite film. USE - The method is useful for preparing graphene carbon nanotube composite film. ADVANTAGE - The method can makes the graphene carbon nanotube composite film have good electrical conductivity, and can replaces traditional indium tin oxide materials and widely used in thin film transistors.