• 专利标题:   Preparing graphene single crystal comprises introducing graphite into a plasma generator reaction chamber, passing argon, oxygen or nitrogen as etching gas, utilizing radio frequency source to ionize gases and bombarding surface of graphite.
  • 专利号:   CN102206867-A, CN102206867-B
  • 发明人:   LIN S
  • 专利权人:   HANGZHOU GELANFENG NANO TECHNOLOGY CO LTD, HANGZHOU GELANFENG NANO TECHNOLOGY CO LT
  • 国际专利分类:   C30B029/02, C30B033/12
  • 专利详细信息:   CN102206867-A 05 Oct 2011 C30B-033/12 201176 Pages: 8 Chinese
  • 申请详细信息:   CN102206867-A CN10112505 03 May 2011
  • 优先权号:   CN10112505

▎ 摘  要

NOVELTY - Preparing graphene single crystal comprises introducing pure graphite with uniform thickness into a plasma generator reaction chamber, where the vacuum degree is below 500 Pa, introducing argon, oxygen or nitrogen as etching gas, controlling etching gas flow rate to 0.001-10000 ml/minute, utilizing radio frequency source to ionize the etching gas and bombarding the surface of graphite, where the graphite thickness is 5 nm. USE - The method is useful for preparing graphene single crystal. ADVANTAGE - The method: is simple; has strong controllability; produces high crystallographic graphene with good quality; and is suitable for industrial production.