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  • 专利标题:   Optical device comprises a substrate having multiple waveguides spaced apart from each other with a predetermined gap into a chamber, and depositing a metal oxide on each of the waveguide through an atomic layer deposition method.
  • 专利号:   KR2022122523-A
  • 发明人:   HAN S, JAE P Y
  • 专利权人:   DAEGU GYEONGBUK INST SCI TECHNOLOGY
  • 国际专利分类:   B81B007/00, B81C001/00, C23C016/40, C23C016/455, G02B006/12, G02B006/132
  • 专利详细信息:   KR2022122523-A 02 Sep 2022 B81C-001/00 202277 Pages: 15
  • 申请详细信息:   KR2022122523-A KR023575 23 Feb 2022
  • 优先权号:   KR026828

▎ 摘　　要

NOVELTY - Manufacture of optical device involves (i) loading a substrate having a waveguides spaced apart from each other with a preset gap into a chamber, and (ii) depositing a metal oxide on each of the waveguides by an atomic layer deposition method. USE - Manufacture of optical device e.g. optical-phased array chip. ADVANTAGE - The gap between the spaced waveguides within the device is reduced. The coupling ratio and the phase shifting characteristic of the optical device are improved.