• 专利标题:   Manufacturing method of graphene-based electrochemical sensor, involves providing metal layer on first substrate.
  • 专利号:   US2016116432-A1, US9476852-B2
  • 发明人:   ACCARDI C, LOVERSO S, RAVESI S, SPARTA N G
  • 专利权人:   STMICROELECTRONICS SRL
  • 国际专利分类:   G01N027/414, H01L029/16, B01L003/00, H01L021/3205, H01L029/66
  • 专利详细信息:   US2016116432-A1 28 Apr 2016 G01N-027/414 201632 Pages: 15 English
  • 申请详细信息:   US2016116432-A1 US986132 31 Dec 2015
  • 优先权号:   ITTO0516

▎ 摘  要

NOVELTY - The method involves providing a metal layer (102) on a first substrate. A graphene layer (105) is formed on the metal layer. A structural layer (106) is formed on the graphene layer. The first side of the second substrate includes first and second electrodes. An intermediate structure is separated from the first substrate and laminated with the graphene layer in electrical contact with the electrodes. A fluidic path is formed on the graphene layer by removing selective portions of the structural layer until the graphene layer is reached. USE - Manufacturing method of graphene-based electrochemical sensor of a microfluidic system used in the semiconductor industry and in the biomedical field for biological analyses. ADVANTAGE - Since the electronic and mechanical properties of graphene implements mechanism of transduction, high conductivity is provided, thereby reducing defectiveness and a considerable sensitivity. DESCRIPTION OF DRAWING(S) - The drawings show steps for manufacturing an electrochemical sensor. Donor substrate (100) Adhesive tape (101) Metal layer (102) Graphene layer (105) Structural layer (106)