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  • 专利标题:   Formation of graphene layer for electrode of e.g. emitter layer system, involves forming amorphous carbon layer on substrate by physical vapor deposition, and carrying out flash annealing in atmosphere of controlled composition.
  • 专利号:   DE102011080553-A1
  • 发明人:   SCHREIL M, BURGHART M, KAUFMANN M
  • 专利权人:   VON ARDENNE ANLAGENTECHNIK GMBH
  • 国际专利分类:   C01B031/04, C23C014/06, C23C014/22
  • 专利详细信息:   DE102011080553-A1 07 Feb 2013 C01B-031/04 201313 Pages: 5 German
  • 申请详细信息:   DE102011080553-A1 DE10080553 05 Aug 2011
  • 优先权号:   DE10080553

▎ 摘　　要

NOVELTY - An amorphous carbon layer is formed on the surface of a substrate by physical vapor deposition, and flash annealing is carried out in atmosphere of controlled composition to enable formation of graphene layer. USE - Formation of graphene layer for electrode of emitter layer system and photoactive system (claimed). ADVANTAGE - The graphene layer is efficiently and economically formed.