• 专利标题:   Preparing graphene field effect transistor useful e.g. for making integrated circuit, comprises forming patterned graphene layer, transferring patterned graphene onto elastic substrate and forming insulation layer and gate electrode.
  • 专利号:   KR2014044763-A, KR1489866-B1
  • 发明人:   GI L S, HO C J, HYEON A J, AHN J H, CHO J H, LEE S K
  • 专利权人:   UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   H01L021/336, H01L029/786
  • 专利详细信息:   KR2014044763-A 15 Apr 2014 H01L-029/786 201437 Pages: 44
  • 申请详细信息:   KR2014044763-A KR119462 07 Oct 2013
  • 优先权号:   KR110953

▎ 摘  要

NOVELTY - Preparing graphene field effect transistor, comprises forming monolithically patterned graphene layer (204) with source electrode (206), drain electrode (208) and semiconductor channel region (210); transferring patterned graphene onto elastic substrate; forming insulation layer (212) on the semiconductor channel region; and forming gate electrode on the insulation layer. USE - The transistor is useful for making integrated circuit, logic device, memory device and radio frequency identification. ADVANTAGE - The preparation method is simple and economical. The transistor has excellent mechanical flexibility, light transmittance, electronic functionality and high elasticity; can be operated under low voltage; and exhibits stable behavior under high strain. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for graphene field effect transistor, prepared by the above method, having stable behavior under external strain of less than 5%. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic sectional view of graphene field effect transistor. Graphene layer (204) Source electrode (206) Drain electrode (208) Semiconductor channel region (210) Insulation layer (212)