▎ 摘 要
NOVELTY - The terahertz wave generating/detecting apparatus comprises: a substrate (10) having an active region and a transmitting region; a lower metal layer (20) extending in a first direction on the active region and the transmitting region of the substrate; a graphene layer (30) disposed on the lower metal layer of the active region; and upper metal layers (50) extending in the first direction on the graphene layer of the active region and the substrate of the transmission region. The terahertz wave is generated or amplified by a surface plasmon polariton. USE - The apparatus is useful for generating/detecting a terahertz wave (claimed) using a graphene layer as an active layer, where the terahertz wave is useful for a non-destructive method, a non-opening method and a non-contact method and in medical and communication fields, medical sciences, agricultural food industry, environment measurement applications, bio applications, nondestructive inspection and advanced material evaluation. ADVANTAGE - The portable apparatus is capable of economically generating/detecting the terahertz wave in a real-time manner. DETAILED DESCRIPTION - The terahertz wave generating/detecting apparatus comprises: a substrate (10) having an active region and a transmitting region; a lower metal layer (20) extending in a first direction on the active region and the transmitting region of the substrate; a graphene layer (30) disposed on the lower metal layer of the active region; and upper metal layers (50) extending in the first direction on the graphene layer of the active region and the substrate of the transmission region. The terahertz wave is generated or amplified by a surface plasmon polariton that is induced on a boundary surface between the graphene layer and the lower metal layer by beated laser light applied to the graphene layer and the lower metal layer. The upper metal layers are spaced apart from each other in a second direction crossing the first direction. The apparatus further comprises: a dielectric layer disposed on the graphene layer between the upper metal layers; an interlayer dielectric provided between the lower metal layer and upper metal layers on the transmitting region; a transmitting antenna (70) connected to the lower metal layer and the upper metal layers on the transmitting region; a receiving antenna connected to the lower metal layer and upper metal layers on the reception region; and a bias input terminal to which a bias voltage is applied to generate or amplify the terahertz wave. The dielectric layer comprises a polymer. The interlayer dielectric surrounds the lower metal layer on the active region of the substrate, and has the same level as the graphene layer. The graphene layer has a width line, which is greater than the lower metal layer. The substrate has a reception region, which is defined in the other side of the active region facing the transmitting region. The lower metal layer and the upper metal layers extend to the reception region. The bias input terminal is disposed between the lower metal layer and the upper metal layers. An INDEPENDENT CLAIM is included for a method for manufacturing a terahertz wave generating/detecting apparatus. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic plan view of a terahertz wave generating/detecting apparatus. Substrate (10) Lower metal layer (20) Graphene layer (30) Upper metal layers (50) Transmitting antenna. (70)