▎ 摘　　要

NOVELTY - Method for improving single crystal diamond polishing efficiency by adding metal oxide, comprises using traditional diamond polishing disc, adding mixed polishing solution of deionized water and alumina or zirconia in a mass ratio of (1:0.2-1: 0.8), mixing the polishing solution at uniform speed drop on the high speed rotating diamond polishing disk, the flow speed is 100-200 ml/h. the rotating speed of the polishing disc is 500-2500 rotation/minute (rpm) and the pressure is 0.5-20 N, where the experimental condition is normal temperature and pressure atmospheric environment. USE - The single crystal diamond is useful in high precision electronic device and cutting tool. ADVANTAGE - The method: uses the mixed polishing solution to protect the diamond polishing disk and provides idea for high processing of the single crystal diamond.