• 专利标题:   Formation of vertical graphene nanostripes used for supercapacitor, involves providing substrate in processing chamber, generating plasma, exposing substrate, and growing graphene nanostripes having preset aspect ratio of length to width.
  • 专利号:   US2020048769-A1
  • 发明人:   YEH N, HSU C
  • 专利权人:   CALIFORNIA INST OF TECHNOLOGY
  • 国际专利分类:   C01B032/186, C01B007/01, C23C016/26, C23C016/44, C23C016/50, C23C016/513
  • 专利详细信息:   US2020048769-A1 13 Feb 2020 C23C-016/513 202019 Pages: 28 English
  • 申请详细信息:   US2020048769-A1 US659339 21 Oct 2019
  • 优先权号:   US563246P, US659339

▎ 摘  要

NOVELTY - Formation of vertical graphene nanostripes involves providing a substrate comprising copper foil or nickel foam, subjecting the substrate to a reduced pressure environment in a processing chamber, providing and flowing methane gas and 6C-containing precursor into the chamber, establishing a partial pressure ratio of the precursor to methane gas is 0-3 in the chamber, generating plasma, exposing the portion(s) of the substrate to methane gas, the precursor and plasma, and growing the nanostripes coupled to the portion(s) of the substrate. The vertical graphene nanostripes have a thickness measured parallel to the substrate, length extending parallel to the substrate in the direction (D1), and width extending orthogonal to the substrate in the direction (D2), and an aspect ratio of the length to width of (10:1)-(130:1). The nanostripes comprise monolayers, and have a thickness normal to the monolayers, length orthogonal to the thickness, and width orthogonal to the thickness. USE - Formation of vertical graphene nanostripes used for supercapacitor and photovoltaic cells. ADVANTAGE - The method enables manufacture of vertical graphene nanostripes with high quality, high yields and excellent electrical mobility. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the plasma-enhanced chemical vapor deposition system for growing graphene nanostripes. Plasma generator (120) Vacuum control valve (148) Temperature controller (210) Furnace (220) Support (230)