• 专利标题:   Growing etching free graphene useful in transparent semiconductor device, comprises preparing a structure comprising conductive metal oxide layer formed on a substrate and exposing structure to gas and growing graphene on layer by heating.
  • 专利号:   KR1437280-B1
  • 发明人:   CHOI J W
  • 专利权人:   UNIV KYUNGHEE IND COOP
  • 国际专利分类:   C30B025/10, C30B025/18, C30B029/36
  • 专利详细信息:   KR1437280-B1 02 Sep 2014 C30B-025/18 201463 Pages: 7
  • 申请详细信息:   KR1437280-B1 KR048767 30 Apr 2013
  • 优先权号:   KR048767

▎ 摘  要

NOVELTY - Growing etching free graphene comprises (a) preparing structure (100) comprising conductive metal oxide (120) layer formed on a substrate (110); and (b) growing graphene (130) on the conductive metal oxide layer by heat treating at 200-450 degrees C while exposing the structure to the gas which comprises carbon. The material of the conductive metal oxide layer is indium tin oxide, indium zinc oxide or aluminum zinc oxide. USE - The etching free graphene is useful in transparent semiconductor device. ADVANTAGE - The method is convenient and economical and saves times, does not require removal of metal layer by etching process, produces graphene at low temperature and maintains excellent characteristics of graphene, and utilizes easy available raw material. DESCRIPTION OF DRAWING(S) - The figure shows a schematic process flow for growing etching free graphene by using conductive metal oxide (Drawing includes non-English language text). Structure (100) Substrate (110) Conductive metal oxides (120) Graphene (130)