• 专利标题:   Equipment for transferring graphene monolayer formed on alloy layer to substrate, has sensor for controlling level and pH of liquids, liquid outlet for draining liquids, stirring element for liquid mixture, and ramp for feeding in substrate.
  • 专利号:   US2017032962-A1, US10354866-B2
  • 发明人:   ZURUTUZA E A, CENTENO P A, ALONSO R B, PESQUERA R A, DE LA FUENTE C J
  • 专利权人:   GRAPHENEA SA, GRAPHENEA SA
  • 国际专利分类:   H01L021/02, H01L021/04, H01L021/67, C23C016/01, C23C016/26, C01B032/194, H01L029/16
  • 专利详细信息:   US2017032962-A1 02 Feb 2017 H01L-021/02 201713 Pages: 10 English
  • 申请详细信息:   US2017032962-A1 US809672 27 Jul 2015
  • 优先权号:   US809672

▎ 摘  要

NOVELTY - The equipment has a sensor for controlling a level and pH of liquids. A liquid outlet drains the liquids, and a stirring element homogenizes a liquid mixture. A ramp feeds in a substrate (4). A shower dispenses the liquids and support points to fix the substrate. A graphene is formed within a chemical vapor deposition (CVD) reactor at relatively high temperatures between 600 degree celsicus-1000 degree celsicus, and is not protected with a polymer layer, where a graphene monolayer is formed by using a metal layer. USE - Equipment for automatically transferring a graphene monolayer formed on a metal layer i.e. alloy layer (claimed), to a substrate. ADVANTAGE - The equipment is reliable, reproducible, scaled up and cost effective manner. The equipment reduces graphene transfer times without jeopardising graphene quality. The equipment is simple to integrate into existing manufacturing processes. The equipment provides very high yields while maintaining the graphene properties and structure intact by minimizing foldings, holes, presence of impurities and detachment from the substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for automatically transferring a graphene monolayer formed on a metal layer to a substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating a method for producing graphene by chemical vapor deposition (CVD), graphene monolayer transfer and removal of a polymethyl methacrylate (PMMA) polymer layer. Graphene monolayer (1) Metal layer (2) Polymer layer (3) Substrate (4)