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  • 专利标题:   Organic-semiconductor film used for channel in transistor structure, has pseudo graphene structure including two-dimensional network structure which is formed continuously.
  • 专利号:   JP2014236111-A, WO2014196487-A1, KR2016016804-A, US2016118589-A1, JP6062321-B2
  • 发明人:   KAGAYA M, MATSUMOTO T, KATO D, KATO T
  • 专利权人:   TOKYO ELECTRON LTD, TOKYO ELECTRON LTD
  • 国际专利分类:   C07B061/00, C07C015/20, C07C002/64, C07C025/22, C08G061/10, H01L029/786, H01L051/05, H01L051/30, H01L051/40, C07C015/14, C07C002/68, H01L051/00, C07C013/64, C07C013/70, C07C002/76
  • 专利详细信息:   JP2014236111-A 15 Dec 2014 H01L-051/30 201501 Pages: 19 Japanese
  • 申请详细信息:   JP2014236111-A JP116758 03 Jun 2013
  • 优先权号:   JP116758, KR733841

▎ 摘　　要

NOVELTY - An organic-semiconductor film has a pseudo graphene structure including two-dimensional network structure (I) which is formed continuously. USE - Organic-semiconductor film is used for channel in transistor structure (claimed). ADVANTAGE - The organic-semiconductor film is formed reliably with desired band gap and continuous two-dimensional structure. DETAILED DESCRIPTION - An organic-semiconductor film has pseudo graphene structure including two-dimensional network structure of formula (I) which is formed continuously. A=biphenyl group of formula (i). An INDEPENDENT CLAIM is included for manufacture of organic semiconductor film, which involves polymerizing 5,5',5",5"',5"",5""'-hexabromocyclohexa-m-phenylene (CHP), and forming two-dimensional network structure (I). The CHP has bromine in a side chain. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic sectional view of film-forming apparatus. Ultra-high-vacuum film-forming apparatus (10) Chamber (11) Raw material cell (12) Open edge portion (12a) Vicinity of edge portion (12b)