▎ 摘　　要

NOVELTY - Preparation of MOF film involves alternately pulse depositing a gas phase of a metal precursor and a gas phase of an organic precursor on a surface of a substrate by molecular layer deposition to obtain an amorphous organic-inorganic hybrid film, and subjecting the hybrid film and an organic ligand to ligand exchange crystallization. USE - Preparation of MOF film used for electronic device, gas separation, biomedical and catalysis applications. ADVANTAGE - The method provides MOF film, which has small surface roughness and good uniformity, and does not involve the participation of organic solvents in preparation of the MOF film, and avoids the problem that solvent molecules remain in the pores of the MOF film, resulting in poor stability of the MOF film. The amorphous organic-inorganic hybrid film has similar porous structure to MOF materials. No large deformation and volume expansion of the film occurs during ligand exchange crystallization.