• 专利标题:   Manufacturing aluminum nitride used as packaging substrate of semiconductors, involves heating electrolyte comprising choline chloride, urea, aluminum chloride, boric acid and ascorbic acid, applying operating current to electroplate aluminum on workpiece, and annealing aluminum on the workpiece.
  • 专利号:   US2022090282-A1, TW202212252-A, TW765358-B1
  • 发明人:   CHUNG C, LEE C, PENG K, KUNZENG P, LEE C Y, ZHONG Q
  • 专利权人:   UNIV MING CHI TECHNOLOGY, UNIV MING CHI TECHNOLOGY
  • 国际专利分类:   C25D003/44, C01B021/072, C25D005/50
  • 专利详细信息:   US2022090282-A1 24 Mar 2022 C25D-003/44 202231 English
  • 申请详细信息:   US2022090282-A1 US465877 03 Sep 2021
  • 优先权号:   TW132791

▎ 摘  要

NOVELTY - Manufacturing aluminum nitride, comprises: providing an electrolyte comprising choline chloride, urea, aluminum chloride, boric acid, and ascorbic acid; disposing a workpiece, where at least a part of the workpiece is in contact with the electrolyte; heating the electrolyte to within 60-95degrees Celsius; applying an operating current to electroplate aluminum onto the workpiece; and annealing the aluminum on the workpiece to form aluminum nitride. The electrolyte further comprises saccharin, graphene or graphene oxide. USE - The method is useful for manufacturing aluminum nitride which is useful as packaging substrate of semiconductors and microelectronics, a substrate for carrying high brightness LED chips, automotive electronics, lighting components, heat-dissipating material for high-power electronic components, IC packaging material, surface acoustic wave (SAW) components, bulk acoustic wave (BAW) components, light-emitting diode, and gate dielectric layer for high-temperature disclosure. ADVANTAGE - The method: provides aluminum nitride having wurtzite structure which belongs to the hexagonal crystal system; solves problem of high cost due to the complex process when the aluminum nitride coatings are manufactured by chemical vapor deposition; utilizes composition of the electrolyte used in the electroplating process is safe and non-toxic, and can be reused to reduce the waste of resources. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of the manufacturing method of aluminum nitride.