• 专利标题:   Broadband transmission infrared light modulator based on graphene plasma used in field of optical device, has substrate, that is covered with modulation layer, and modulation layer is provided with a non-metallic grating layer.
  • 专利号:   CN111458906-A
  • 发明人:   WANG Q, YUAN Z, CAO B, XIONG X, HE G, ZHOU H, LUO A, CHEN W, XU L
  • 专利权人:   UNIV SOOCHOW
  • 国际专利分类:   G02F001/00, G02F001/01
  • 专利详细信息:   CN111458906-A 28 Jul 2020 G02F-001/01 202065 Pages: 11 Chinese
  • 申请详细信息:   CN111458906-A CN10350642 28 Apr 2020
  • 优先权号:   CN10350642

▎ 摘  要

NOVELTY - The light modulator comprises a substrate (1), that is covered with a modulation layer (2). The modulation layer is provided with a non-metallic grating layer (3) by coating-etching. The non-metallic grating layer is provided with a metal grating layer (4) by coating. The sides of the substrate are respectively coated with the first electrode (5) and the second electrode (6). The modulation layer is graphene. The graphene is directly grown or transferred to the substrate. The graphene is of a single layer or multiple layers. The graphene shape is complete graphene or graphene nanoribbon array. The non-metallic grating layer is made of silicon. The non-metallic grating layer is deposited on the modulation layer by a coating process. The non-metallic grating layer is formed through an etching process. USE - Broadband transmission infrared light modulator based on graphene plasma used in the field of the optical device. ADVANTAGE - The light modulator is achieving high modulation depth and wide modulation bandwidth for transmitted light. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the light modulator. Substrate (1) Modulation layer (2) Non-metallic grating layer (3) Metal grating layer (4) First electrode (5) Second electrode (6)