▎ 摘　　要

NOVELTY - The sensor has a gate electrode (2) arranged on a substrate (1). A portion of a dielectric layer (3) is arranged on the substrate. Another portion of the dielectric layer is provided on the gate electrode. A source electrode (4) and a drain electrode (5) are arranged on substrate. A bottom protective film (6) is provided with a bottom first protective film and a bottom second protective film. An external temperature sensitive layer (8) is connected with the bottom second protection film and the source electrode and drain electrode. Top portions of the top protective membrane (9) and the top of the second protective membrane (10) are provided on substrate. The top portion of first protective membrane and top portion of second protective membrane are connected with outer temperature sensitive layers. USE - Used as high temperature sensor based on multilayer film thermal protection. ADVANTAGE - The protective structure uses micro-nano-plane processing technology, prepares multilayer nano-protective film on the graphene upper surface and lower surface, forming a sandwich structure, avoiding the pollution of the impurity particles in the environment and directly contacting with oxygen at high temperature. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of the high temperature sensor based on multilayer film thermal protection. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a high temperature sensor based on multilayer film thermal protection. Substrate (1) Gate electrode (2) Dielectric layer (3) Source electrode (4) Drain electrode (5) Bottom first protective film (6) Bottom second protective film (7) External temperature sensitive layer (8) Top part protective film (9) Top part second protective film (10)