▎ 摘　　要

NOVELTY - This utility model claims a kind of vapour deposition equipment. This utility model is a kind of used for preparing graphene thin film chemical vapour deposition device, wherein the device comprises a quartz tube, said quartz tube through flange is connected with a charging system, the quartz tube through the flange are respectively connected with an air pressure regulator and a vacuum system, wherein the quartz tube is surrounded by heating. Chemical vapour deposition device of this utility model can compatible with normal pressure and vacuum two-kind of a graphene thin film technology, it can realize two different mechanism limit and dialysis of the graphene thin film growth method to realize the whole graphene thin film growth process of real time monitoring and automation.