• 专利标题:   Testing apparatus has light source which is adjacent to first side of graphene-based SPR sensor proximal to graphene, and detector which is adjacent to second side of graphene-based SPR sensor proximal to conductive layer.
  • 专利号:   US2016341662-A1
  • 发明人:   AVOURIS P, FARMER D B, LI Y, YAN H
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01N021/552, H01L021/02, H01L021/04, H01L021/56
  • 专利详细信息:   US2016341662-A1 24 Nov 2016 G01N-021/552 201680 Pages: 17 English
  • 申请详细信息:   US2016341662-A1 US225339 01 Aug 2016
  • 优先权号:   US313456, US225339

▎ 摘  要

NOVELTY - The apparatus has a graphene-based surface plasmon resonance (SPR) sensor which has a conductive layer, a dielectric layer on the conductive layer, and graphene on a side of the dielectric layer opposite the conductive layer (104a). A light source is adjacent to a first side of the graphene-based SPR sensor proximal to the graphene, and a detector is adjacent to a second side of the graphene-based SPR sensor proximal to the conductive layer. The graphene has multiple, evenly spaced graphene strips, in which each of the graphene strips has a width of from about 50 nanometers to 5 micrometers. USE - Testing apparatus. ADVANTAGE - The device provides improved plasmonic materials for SPR sensing. Prevents distortion of the graphene from occurring by employing a material in the trenches having a different permittivity. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional diagram illustrating an optional coating having been deposited onto the substrate covering and protecting the graphene nanoribbons. Substrate (104) Conductive layer (104a) Insulating dielectric layer (104b) Nanoribbon (302) Coating (502)