• 专利标题:   Multi-gate graphene FET structure for use in bio-logical medical field, has graphite micro-belt located in etching groove, upper insulation layer is formed with nanometer hole, and semiconductor layer arranged with releasing window.
  • 专利号:   CN103995035-A
  • 发明人:   CHEN Y, LIU L, LI T, MA J, NI Z, SHA J, YI H, YUAN Z, ZHANG Y
  • 专利权人:   UNIV SOUTHEAST, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   G01N027/414, H01L021/335, H01L029/772
  • 专利详细信息:   CN103995035-A 20 Aug 2014 G01N-027/414 201475 Pages: 21 Chinese
  • 申请详细信息:   CN103995035-A CN10236223 29 May 2014
  • 优先权号:   CN10236223

▎ 摘  要

NOVELTY - The structure has a mask substrate (1) whose middle part is fixed with a releasing window (11). A graphite micro-belt (42) is located in an etching groove (21). A semiconductor nanometer blind hole layer (22) is formed with a silicon oxide nanometer blind hole (32). A semiconductor layer (2) is arranged with the releasing window. A silicon oxide insulation layer (3) is arranged with a door window. An insulation layer (5) is located on an electrode layer. An upper part of the insulation layer is formed with a nanometer hole (45). USE - Multi-gate graphene FET structure for use in a bio-logical medical field. ADVANTAGE - The structure is inexpensive, and occupies less space. The structure utilizes CMOS to improve compatibility and expansibility of a FET. The structure has wide application range. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a multi-gate graphene FET structure manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a multi-gate graphene FET structure. Mask substrate (1) Semiconductor layer (2) Silicon oxide insulation layer (3) Insulation layer (5) Releasing window (11) Etching groove (21) Semiconductor nanometer blind hole layer (22) Silicon oxide nanometer blind hole (32) Graphite micro-belt (42) Nanometer hole (45)