• 专利标题:   Graphene nano-wire production method involves producing source electrode, drain electrode and gate device to form graphene nano-wire device.
  • 专利号:   CN103915348-A, CN103915348-B
  • 发明人:   YANG S, ZHOU P, SHEN Y
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   B82Y040/00, H01L021/336
  • 专利详细信息:   CN103915348-A 09 Jul 2014 H01L-021/336 201465 Pages: 7 Chinese
  • 申请详细信息:   CN103915348-A CN10157130 19 Apr 2014
  • 优先权号:   CN10157130

▎ 摘  要

NOVELTY - The method involves using chemical vapor deposition method to form a layer of silicon nitride on the silicon substrate as an etching protective layer, and then etching the one slender nanometer groove of silicon dioxide substrate. Several continuous copper layers are formed to the nano-inner groove using low pressure chemical vapour deposition. The atom layer deposition process is used to cover the graphene nano-line form high-k gate medium. The source electrode, drain electrode and gate device are provided to form the graphene nano-wire device. USE - Graphene nano-wire preparation method. ADVANTAGE - The production of graphene nano-wire is performed easily, conveniently and reliably. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram explaining the process for preparing graphene nano-wire. (Drawing includes non-English language text)