• 专利标题:   Graphene field-effect transistor, has substrate provided with conductive layer and gate structure, and convex strips transversely arranged to each other in parallel manner, and channel layer graphene located on convex strip on top part of grid mechanism.
  • 专利号:   CN115799313-A
  • 发明人:   YI J, JU Y, KANG S, WANG D, LU W, WANG W
  • 专利权人:   CHONGQING GRAPHENE INST
  • 国际专利分类:   H01L021/335, H01L029/10, H01L029/16, H01L029/417, H01L029/423, H01L029/772
  • 专利详细信息:   CN115799313-A 14 Mar 2023 H01L-029/16 202326 Chinese
  • 申请详细信息:   CN115799313-A CN11618640 16 Dec 2022
  • 优先权号:   CN11618640

▎ 摘  要

NOVELTY - The transistor has a source electrode and a drain electrode arranged opposite to each other. A gate electrode structure is located between the drain electrode and the source electrode. A graphene channel layer (10) is formed between the drain electrode and the source electrode. A top part structure is provided with multiple convex strips (13). Multiple convex strips are transversely arranged to each other in a parallel manner, where a gap (3) is formed between the adjacent convex strips. The channel layer graphene is located on the convex strip on a top part of a grid mechanism. The convex strips are formed as a semi-circular-shaped structure, where the graphene channel layer is a graphene film and a deposited metal is titanium, platinum, chromium, gold, aluminum, nickel, copper and silver. USE - Graphene FET. ADVANTAGE - The graphene channel layer in the solution is located on the convex strip, because there is a gap between the adjacent convex strips, so that the graphene in the upper surface of the channel layer and the gate structure is not completely contact, thus reducing the influence of the substrate on the graphene, and hence improving the carrier mobility of the graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a graphene field-effect transistor (FET). DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a graphene FET. 2Gate structure 3Gap 10Graphene channel layer 13Convex strips