• 专利标题:   Semiconductor device for use in e.g. portable communication apparatus, has electrode structure including lower electrode with metal pattern to confine heating pattern, and graphene pattern interposed between metal and heating patterns.
  • 专利号:   US8916973-B1, KR2015021362-A
  • 发明人:   KIM E S, SEO J W, KIM J H
  • 专利权人:   SK HYNIX INC, SK HYNIX INC
  • 国际专利分类:   H01L023/34, H01L045/00, H01L027/115, H01L029/49
  • 专利详细信息:   US8916973-B1 23 Dec 2014 H01L-045/00 201502 Pages: 11 English
  • 申请详细信息:   US8916973-B1 US076889 11 Nov 2013
  • 优先权号:   KR098623

▎ 摘  要

NOVELTY - The device has a data storage layer formed over a semiconductor substrate (110) in which a lower structure is formed. An electrode structure is formed on a side of the data storage layer over the substrate. The electrode structure includes a lower electrode (120) placed below the data storage layer and including a heating pattern (125) for contacting a phase-change material pattern (130) and generating heat when current flows. A metal pattern (121) is provided in shape to confine the heating pattern. A graphene pattern (123) is interposed between the metal pattern and the heating pattern. USE - Semiconductor device for use in an electronic apparatus e.g. computer and portable communication apparatus. ADVANTAGE - The device reduces metal resistance and prevents adjacent cells from being affected in process of storing data in a selected cell required in the device in an efficient manner, while improving cell efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a semiconductor device. Semiconductor substrate (110) Interlayer insulating layers (113, 113A, 113B, 127) Switching device (115) Lower electrode (120) Metal pattern (121) Graphene pattern (123) Heating pattern (125) Phase-change material pattern (130) Upper electrode (150)