• 专利标题:   Nitrogen oxide gas sensor has micro heater platform substrate that is provided with sulfur doped graphene, and test electrode and heater that are arranged on substrate, and graphene that is configured to cover test electrode.
  • 专利号:   CN205091287-U
  • 发明人:   GUO L, LI T, LIANG C, WANG Y
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C01B031/04, G01N027/00
  • 专利详细信息:   CN205091287-U 16 Mar 2016 G01N-027/00 201637 Pages: 16 English
  • 申请详细信息:   CN205091287-U CN20894592 11 Nov 2015
  • 优先权号:   CN20894592

▎ 摘  要

NOVELTY - This utility model claims a nitrogen oxide gas sensor based on sulfur-doped graphite alkene, comprising the micro-heater platform substrate and sulfur doped graphene on the micro-heater platform substrate provided with test electrode and heater, the sulfur doped graphene at least covering the measuring electrode. The utility model nitrogen oxide gas sensor based on sulfur-doped graphite alkene can use wafer level substrate, implementing wafer-scale preparation, reaching to batch manufacturing level, greatly reducing production cost. This utility model nitrogen oxide gas sensor based on sulfur-doped graphite alkene to nitrogen oxide gas molecule with high sensitivity and selectivity, and can effective reduce steam equal other gas to detect the influence, increase precision of detection.