▎ 摘 要
NOVELTY - This utility model claims a nitrogen oxide gas sensor based on sulfur-doped graphite alkene, comprising the micro-heater platform substrate and sulfur doped graphene on the micro-heater platform substrate provided with test electrode and heater, the sulfur doped graphene at least covering the measuring electrode. The utility model nitrogen oxide gas sensor based on sulfur-doped graphite alkene can use wafer level substrate, implementing wafer-scale preparation, reaching to batch manufacturing level, greatly reducing production cost. This utility model nitrogen oxide gas sensor based on sulfur-doped graphite alkene to nitrogen oxide gas molecule with high sensitivity and selectivity, and can effective reduce steam equal other gas to detect the influence, increase precision of detection.