• 专利标题:   SOI substrate graphene transistor terahertz wave double-point selecting frequency modulator, has aluminum oxide grate medium layer and source electrode that are arranged on electrode dual-frequency point beyond material resonance structure.
  • 专利号:   CN105892103-A, CN105892103-B
  • 发明人:   CHEN Z, LIU C, LIU Y, SHEN Y, WEN Q, YIN L, YANG Q, ZHANG H, WEN T, LI J, TU X
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G02F001/015, H01L021/762, H01L029/16, H01L029/78
  • 专利详细信息:   CN105892103-A 24 Aug 2016 G02F-001/015 201663 Pages: 10 Chinese
  • 申请详细信息:   CN105892103-A CN10223600 12 Apr 2016
  • 优先权号:   CN10223600

▎ 摘  要

NOVELTY - The modulator has a leakage electrode-dual-frequency point beyond material resonance structure (106) fixed on a graphene thin film (103) to realize double-frequency point modulation. An annular grate electrode (104) is arranged on a surface of a SOI substrate (101). An aluminum oxide grate medium layer (102) and a source electrode (105) are arranged on the leakage electrode dual-frequency point beyond material resonance structure. The leakage electrode-dual-frequency point beyond material resonance structure is made of silver, gold, copper, nickel and aluminum material. USE - SOI substrate graphene transistor terahertz wave double-point selecting frequency modulator. ADVANTAGE - The modulator reduces frequency loss, avoids working voltage adjustor requirements and realizes double-frequency point selecting frequency modulating process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a SOI substrate graphene transistor terahertz wave double-point selecting frequency modulator manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a SOI substrate graphene transistor terahertz wave double-point selecting frequency modulator. SOI substrate (101) Aluminum oxide grate medium layer (102) Graphene thin film (103) Annular grate electrode (104) Source electrode (105) Leakage electrode-dual-frequency point beyond material resonance structure (106)