• 专利标题:   Semiconductor device for electronic apparatus, has graphene layer that is disposed on and connects source and semiconductor element, and spaced apart from drain.
  • 专利号:   WO2015050328-A1, KR2015039052-A, US2016247906-A1, US9722068-B2
  • 发明人:   WENXU X, KIM Y, MOON C, PARK Y, YANG W, LEE J, KIM Y S, MOON C Y, PARK Y Y, YANG W Y, LEE J Y, LEE J H
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/336, H01L029/78, H01L021/306, H01L021/3105, H01L029/06, H01L029/08, H01L029/10, H01L029/16, H01L029/24, H01L029/423, H01L029/45, H01L029/47, H01L029/66, H01L029/778
  • 专利详细信息:   WO2015050328-A1 09 Apr 2015 H01L-029/78 201527 Pages: 41 English
  • 申请详细信息:   WO2015050328-A1 WOKR008591 16 Sep 2014
  • 优先权号:   KR117592

▎ 摘  要

NOVELTY - The semiconductor device has a source (S10) and a drain (D10) that are spaced apart from each other. A semiconductor element (C10) is between the source and drain, and contacts the drain and spaced apart from the source. A graphene layer (GP10) is disposed on and connects the source and semiconductor element. The graphene layer is spaced apart from the drain. A gate (G10) is formed on a gate insulating layer (G110) that is disposed on the graphene layer. USE - Semiconductor device e.g. transistor and planar type graphene barristor for electronic apparatus. ADVANTAGE - Contact characteristics between graphene and semiconductor element is improved by preventing damage of graphene due to plasma processes or sputtering processes, while reducing the size of device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows the cross sectional view of the semiconductor device. Semiconductor element (C10) Drain (D10) Gate (G10) Gate insulating layer (G110) Graphene layer (GP10) Source (S10)