▎ 摘 要
NOVELTY - Flexible graphene thin film comprises flexible substrate; a titanium buffer layer grown on one side of the flexible substrate by sputtering; and graphene thin film layer grown in-situ in the same equipment as the sputtering equipment on one surface of the titanium buffer layer. The flexible substrate maintains a strain recovery of substrate of ≥ 98% when the titanium buffer layer and the graphene thin film layer are stretched by ≥ 10% in a grown state in which they are grown. USE - The flexible graphene thin film is useful for transparent electrode devices and elongated device. ADVANTAGE - The flexible graphene thin film: has excellent structural stability and thermal/electrical conductivity and simple manufacturing process; is stable and suitable for mass-production; prevents mechanical damage such as wrinkles, cracks, and ripples on one side of graphene in the transfer process; improves adhesive strength and bonding force between the substrate and the graphene thin film layer; saves time; decreases sheet resistance during tension; directly grows graphene on a flexible substrate by lowering the growth temperature of the graphene thin film layer to ≤ 200° C; and maintains electrical properties even when stretched in a tensile strain range of ≤ 15% and repeatedly stretched at 5-10%. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: producing a flexible graphene thin film comprising (a) forming a titanium buffer layer on a flexible substrate and (b) growing a graphene thin film layer on the titanium buffer layer in-situ in the same device; and flexible graphene thin film-based electronic device comprising flexible substrate, titanium buffer layer grown on one side of the flexible substrate by sputtering, and graphene thin film layer grown in-situ in the same equipment as the sputtering equipment on one surface of the titanium buffer layer. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a method of manufacturing a flexible graphene thin film (Drawing includes non-English language text).