• 专利标题:   Organic LED (OLED) evaporation mask plate, has mask plate upper plate movably buckled on mask plate lower plate and provided with fine adjusting lifting mechanism and opening of mounting cavity layer is provided with sealing mechanism.
  • 专利号:   CN113637940-A, CN215628246-U
  • 发明人:   LUO X, WANG H
  • 专利权人:   CHONGQING HIGHBOARD DISPLAY TECHNOLOGY
  • 国际专利分类:   C23C014/04, C23C014/24, H01L051/56
  • 专利详细信息:   CN113637940-A 12 Nov 2021 C23C-014/04 202208 Chinese
  • 申请详细信息:   CN113637940-A CN11001172 30 Aug 2021
  • 优先权号:   CN11001172, CN22084867

▎ 摘  要

NOVELTY - The mask has a mask main body provided with a mask plate upper plate and a mask lower plate. A mounting cavity layer is provided between the mask upper plate and the mask plate lower plate. An inner wall of the installation cavity layer is covered with a graphene layer. An OLED display substrate (1) is tightly installed in the installation cavities. The mask upper board is provided with an opening area. A local mask plate mechanism (3) is slidingly arranged in the mask board main body. A positioning mechanism (4) is arranged between a mask board body (2) and a partial mask board mechanism. The mask board upper plate is movably buckled on the mask lower board. A fine-tuning lifting mechanism is provided between the mask plate and the mask lower plate, and a sealing mechanism (6) is also provided at the opening of the mounting cavity layer. USE - OLED evaporation mask plate for use in a lithography process. Uses include but are not limited to integrated circuit (IC), flat panel display (FPD), printed circuit board (PCB) and micro electromechanical system (MEMS). ADVANTAGE - The plate does not need to change the mask plate in the evaporation process of the pixel of the same color, so that the pixel does not generate position deviation, thus greatly improving the OLED display substrate and improving the quality and efficiency of the OLED. The plate is simple in structure, stable and reliable to use, and avoids dislocation movement in the process of mounting the mounting cavity layer, and has high quality and high efficiency, and reduces the difficulty of installing the display substrate in the cavity layer by the fine tuning lifting mechanism. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an application method of a mask for OLED vapor deposition capable of improving vapor deposition quality. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the front structure of a OLED evaporation mask plate for use in a lithography process. OLED display substrate (1) Mask board body (2) Local mask plate mechanism (3) Positioning mechanism (4) Sealing mechanism (6)