• 专利标题:   Preparing high abrasion resistance chemical mechanical polishing pad used for production of semiconductor chips, by mechanically dispersing filler and surfactant in organic solvent to obtain dispersion, adding resin solution to dispersion, stirring and coating on transparent film coiled material.
  • 专利号:   CN115972084-A
  • 发明人:   YAO L, CHEN H, XIANG H
  • 专利权人:   NINGBO KONFOONG MATERIALS INT CO LTD, NINGBO YINGWEI TAIKE NEW MATERIALS CO
  • 国际专利分类:   B24B001/00, B24B037/24, B24D018/00, C09D175/04, C09D007/61
  • 专利详细信息:   CN115972084-A 18 Apr 2023 B24B-037/24 202343 Chinese
  • 申请详细信息:   CN115972084-A CN11035655 26 Aug 2022
  • 优先权号:   CN11035655

▎ 摘  要

NOVELTY - Method for preparing a high abrasion resistance chemical mechanical polishing pad, comprises (S1) mechanically dispersing a filler and a surfactant in an organic solvent to obtain a dispersion, (S2) adding a resin solution to the dispersion obtained in the step (S1), and stirring to obtain resin slurry, and (S3) coating the resin slurry obtained in the step (S2) on a transparent film coiled material, and preparing the high-abrasion resistance chemical mechanical polishing pad through post treatment. USE - The high abrasion resistance chemical mechanical polishing pad is used in a chemical mechanical polishing process in the production of semiconductor chips (claimed). ADVANTAGE - The method improves the physical and mechanical properties of a polyurethane film formed by condensation, prolongs the service life of a polishing pad, and improves the stability of polishing performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the high abrasion resistance chemical mechanical polishing pad prepared by the above method.