▎ 摘　　要

NOVELTY - The method involves performing back etching of a thin membrane substrate (105) to form a thin membrane window array (100). A flexible substrate (103) is adhered to the thin membrane substrate. The thin membrane window array is aligned to a target feature array formed at the side of a target substrate. The thin membrane window array contacts the side of the target substrate while maintaining alignment, and transferred to the target feature array on the side of the target substrate. USE - Aligned transfer method of thin membranes e.g. graphene windows to silicon target test chip. ADVANTAGE - The method provides efficient and facile process for transferring thin membranes to substrates following alignment of the membranes to substrate features. The method is simplified by eliminating steps that chemically or physically modify the thin membrane when transferred onto the target substrate, such as the need to immerse one or both sides of the transferred thin membrane in liquid. DESCRIPTION OF DRAWING(S) - The drawing shows the cross sectional view illustrating the transfer of thin membrane window array to substrate using liquid-less transfer method. Thin membrane window array (100) Thin membranes (101a-101c) Copper foil (102) Flexible substrate (103) Thin membrane substrate (105)