• 专利标题:   Manufacturing method for graphene device, involves providing substrate, where substrate comprises insulating layer and semiconductor layer, forming source/drain contact plug on back gate electrode.
  • 专利号:   CN103107077-A, CN103107077-B
  • 发明人:   ZHU H, LIU X, ZHONG H, LIANG Q, JIN Z
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI, INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/28, H01L029/423, H01L029/49
  • 专利详细信息:   CN103107077-A 15 May 2013 H01L-021/28 201366 Pages: 14 Chinese
  • 申请详细信息:   CN103107077-A CN10360220 14 Nov 2011
  • 优先权号:   CN10360220

▎ 摘  要

NOVELTY - The method involves providing a substrate, where the substrate comprises an insulating layer and a semiconductor layer. A back gate electrode in the semiconductor layer is formed. A gate dielectric layer on a grid electrode is formed. A graphene-containing layer on the gate dielectric layer is formed. A back gate contact plug on a back gate contact layer is formed. A source/drain contact plug on the back gate electrode is formed. USE - Manufacturing method for graphene device. ADVANTAGE - The method enables providing a simple operation, and existing complementary metal-oxide-semiconductor transistor technology with good compatibility. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a manufacturing method for graphene device.'(Drawing includes non-English language text)'