• 专利标题:   Device for manufacturing two-dimensional nanometer film e.g. graphene film, has balance chamber, processing chamber and discharging chamber which are respectively connected with independent vacuumizing device.
  • 专利号:   CN202576544-U
  • 发明人:   HUANG W, XU M, ZHONG M
  • 专利权人:   HUANG W, XU M, ZHONG M
  • 国际专利分类:   C23C014/22, C23C014/56, C23C016/44, C23C016/54
  • 专利详细信息:   CN202576544-U 05 Dec 2012 C23C-014/22 201329 Pages: 15 Chinese
  • 申请详细信息:   CN202576544-U CN20182955 27 Apr 2012
  • 优先权号:   CN20182955

▎ 摘  要

NOVELTY - The device has a feeding chamber which is provided with an air outlet connected with air valve. A treatment chamber is connected with the first balance chamber. The discharging chamber is provided with an air outlet which is connected with another atmosphere valve. The first processing chamber and discharging chamber are provided with a sample delivery device. The second balance chamber, second processing chamber and the discharging chamber are respectively connected with independent vacuumizing device. USE - Device for manufacturing two-dimensional nanometer film such as graphene film, metal sulphide film , silicon film , germanium olefinic film or boron nitride film (all claimed). ADVANTAGE - The large-scale production of two-dimensional nanometer film can be achieved.