▎ 摘　　要

NOVELTY - The accelerometer has a cross beam (4) fixed between a sensitive mass block (2) and a fixing frame (1) and vertical to a direction of a shaft, where the fixing frame, the sensitive mass block, the connecting beam and the cross beam are made of single crystal silicon material. Two ends of the beam are fixedly connected with the fixing frame. Two ends of a connecting beam (3) are horizontally arranged and connected with the sensitive mass block and the cross beam. The cross beam and the fixing frame corresponding to end position of the connecting beam are respectively provided with two insulating layers made of silicon dioxide material. Two ends of a graphene strip (6) are respectively fixed on the insulating layers. An electrode (7) is provided on an upper surface of the graphene strip, where the electrode is made of titanium-gold or platinum-gold material. Axial rigidity of the connection beam is greater than tangential rigidity. USE - Graphite alkene double-shaft differential resonance accelerometer for use in industrial fields such as inertial navigation and attitude measurement fields. Can also be used for a capacitance type accelerometer, a piezoresistive type accelerometer and a piezoelectric type accelerometer. ADVANTAGE - The accelerometer uses graphene as vibrator, improves sensitivity and accuracy of the detection result. The accelerometer has simple structure, and can realize the acceleration measurement with very high sensitivity. The displacement generated by the sensitive mass block under the inertia force will not be directly transmitted to the graphene strip, thus preventing the graphene strip from breakage caused by too large displacement, at the same time, ensuring posture level of the graphene in the working process, reducing the measuring error. The tangential rigidity of the connecting beam is less than the axial rigidity, so the tangential acceleration is less transmitted to cross beam so as to realize the independent measurement of the biaxial acceleration. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the graphite alkene double-shaft differential resonance accelerometer. Fixing frame (1) Sensitive mass block (2) Connecting beam (3) Cross-beam (4) Graphene strip (6) Electrode (7) Lower packaging cover (8)