▎ 摘　　要

NOVELTY - Manufacturing micro gas sensor involves preparing graphene quantum dots with carboxyl and hydroxyl groups by pre-configured multiple groups of solutions, selecting functional group molecules with response ability to special gas molecule, grafting functional group molecules with graphene quantum dots with carboxyl and hydroxyl, preparing graphene quantum dots with specified functional groups, preparing inter-digital electrode by using pre-configured material, and dropping graphene quantum drops with appointed functional group on silicone chip with inter-digital electrode to form a layer of thin film to cover electrode. USE - Method for manufacturing a micro gas sensor i.e. electric signal gas sensor, optical signal gas, acoustic signal gas sensor and mass and deformation gas sensor. ADVANTAGE - The method enables to manufacture micro gas sensor that has excellent conductivity of graphene quantum dot, exerts specific response of functional group to gas molecule, made into gas sensor with integral size in micron level, saves energy consumption and safety reliable, does not need to repeatedly heat, and prolongs service life of sensor. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a micro gas sensor, which comprises silicone wafer, two electrodes arranged on silicone wafer in a crossed manner, inter-digital gap arranged between two electrodes, and thin film arranged on silicon wafer and covers the electrodes. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart of a method for manufacturing micro gas sensor. (Drawing includes non-English language text).