▎ 摘 要
NOVELTY - The sensor has a sensing electrode (40) extending in a direction on a substrate i.e. flexible substrate. A set of heaters (50) is arranged in another direction that crosses the direction on the substrate. The set of heaters is separated at both sides of the sensing electrode, where the set of heaters comprises graphene or graphene oxide. An interlayer insulating layer (30) is arranged between the sensing electrode and the substrate. A lower heater layer is arranged between the interlayer insulating layer and the substrate, where the lower heater layer comprises the graphene. USE - Gas sensor e.g. micro gas sensor such as sliced portion micro gas sensor, a transparent gas sensor and a flexible gas sensor. ADVANTAGE - The gas sensor comprises the heaters that include the graphene. The graphene includes carbon atoms of six-unit ring. The graphene carbon atoms of a single layer are transparent, and the carbon atoms have excellent elasticity, thus preventing the loss of electrical properties when the single layer is elongated and bent. DETAILED DESCRIPTION - The flexible substrate is a transparent plastic substrate. An INDEPENDENT CLAIM is also included for a manufacturing method of a gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of a gas sensor. Interlayer insulating layer (30) Sensing electrode (40) Channel (42) Terminals (44, 46) Heaters (50)