▎ 摘　　要

NOVELTY - The piezoresistive vacuum gauge has multiple graphene sensing elements (1) that comprise multiple stacked graphene sheets. The carrier (2) is set with flexible carrier coated on the outer surface of the graphene sensing element and tightly attached with the graphene sensing element. An electrode (3) is connected to the outer surface of graphene sensing element to form a circuit for monitoring the current loop. The carrier is set with a rigid carrier. The flexible carrier is adhered to the rigid carrier or placed between two sheets of rigid carrier. USE - Graphene-based piezoresistive vacuum gauge for thin and small devices, used in industries and scientific research field such as semiconductor technology field, surface engineering field and space science field. ADVANTAGE - The piezoresistive vacuum gauge with high sensitivity, fast response speed and small measurement error is provided and manufactured at low cost. The vacuum pressure can be measured accurately and rapidly using graphene sensing elements. The response time of the tail is reduced. The durability of the vacuum gauge is increased and power loss is lowered. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing graphene-based piezoresistive vacuum gauge. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the graphene-based piezoresistive vacuum gauge. Sensing element (1) Carrier (2) Electrode (3)