• 专利标题:   Preparation of large-area graphene on insulating substrate, for circuit device, involves supplying hydrogen to reactor in which insulating substrate and copper foil are placed, introducing carbon source, and carrying out growth.
  • 专利号:   CN103172061-A
  • 发明人:   YU D, CHEN J, SHI T, WU X
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN103172061-A 26 Jun 2013 C01B-031/04 201377 Pages: 8 Chinese
  • 申请详细信息:   CN103172061-A CN10130476 16 Apr 2013
  • 优先权号:   CN10130476

▎ 摘  要

NOVELTY - An insulating substrate and a copper foil are placed in a reactor, a mixed gas of protection gas and hydrogen is supplied, and the sample is heated. The reactor pressure is adjusted to 100-120 Pa, a carbon source, a protective gas, and hydrogen are introduced, and growth is carried out for 20-40 minutes. The pressure is then changed to 400-500 Pa and growth is carried out for 50-70 minutes. The temperature is reduced to obtain large-area graphene deposited on the insulating substrate. USE - Preparation of large-area graphene on insulating substrate by chemical vapor deposition, for circuit device. ADVANTAGE - The method enables simple and economical preparation of large-area graphene with high repeatability and low external interference, without requiring a complicated transfer process. DETAILED DESCRIPTION - An insulating substrate and a copper foil are cleaned. A mixed gas of protection gas and hydrogen is supplied to a reactor, and the cleaned sample is placed in the reactor, heated to 1005-1030 degrees C, and heat-preserved for 10-30 minutes. The reactor temperature is maintained and pressure is adjusted to 100-120 Pa, a carbon source, a protective gas, and hydrogen are introduced, and growth is carried out for 20-40 minutes. The pressure is then changed to 400-500 Pa and growth is carried out for 50-70 minutes. The temperature is reduced to room temperature and the sample is taken out as large-area graphene deposited on the insulating substrate.