▎ 摘 要
NOVELTY - The utility model claims a high performance vacuum ultraviolet photoelectric detector, the vacuum ultraviolet photoelectric detector comprises a gallium nitride substrate layer, aluminium nitride vacuum ultraviolet absorption layer, a graphene transparent electrode layer, silver electrode and photocurrent detecting device; gallium nitride substrate layer on part of the epitaxial growing aluminium nitride vacuum ultraviolet absorption layer, graphene transparent electrode layer is partially covered on the aluminium nitride vacuum ultraviolet absorption layer, silver electrode set on the aluminium nitride vacuum ultraviolet absorption layer, and it is set with graphene transparent electrode layer interval. graphene transparent electrode layer and the silver electrode are respectively electrically connected with the current detecting device. the device has high vacuum ultraviolet response, high external quantum efficiency and temperature response is extremely fast, and can effectively inhibit the noise voltage density can be used for capturing image celestial body movable in ultra-fast dynamic process.