• 专利标题:   High performance vacuum UV photoelectric detector, has graphene transparent electrode layer partially covered on aluminum nitride vacuum UV absorption layer, where electrode layer and silver electrode are connected with current detection device.
  • 专利号:   CN209626234-U
  • 发明人:   XU J, CHEN Y, ZHAO S
  • 专利权人:   BEIJING LANMU TECHNOLOGY CO LTD
  • 国际专利分类:   H01L031/028, H01L031/0224
  • 专利详细信息:   CN209626234-U 12 Nov 2019 H01L-031/028 201989 Pages: 6 Chinese
  • 申请详细信息:   CN209626234-U CN20657598 08 May 2019
  • 优先权号:   CN20657598

▎ 摘  要

NOVELTY - The utility model claims a high performance vacuum ultraviolet photoelectric detector, the vacuum ultraviolet photoelectric detector comprises a gallium nitride substrate layer, aluminium nitride vacuum ultraviolet absorption layer, a graphene transparent electrode layer, silver electrode and photocurrent detecting device; gallium nitride substrate layer on part of the epitaxial growing aluminium nitride vacuum ultraviolet absorption layer, graphene transparent electrode layer is partially covered on the aluminium nitride vacuum ultraviolet absorption layer, silver electrode set on the aluminium nitride vacuum ultraviolet absorption layer, and it is set with graphene transparent electrode layer interval. graphene transparent electrode layer and the silver electrode are respectively electrically connected with the current detecting device. the device has high vacuum ultraviolet response, high external quantum efficiency and temperature response is extremely fast, and can effectively inhibit the noise voltage density can be used for capturing image celestial body movable in ultra-fast dynamic process.