▎ 摘　　要

NOVELTY - Humidity sensor has a substrate whose surface is provided with an interdigital electrode. The substrate is coated with a humidity sensitive layer. The humidity sensitive layer completely covers the interdigital electrode. The material of the humidity sensitive layer is provided with sepiolite, carbon material and solvent. The carbon material is dispersed in the solvent, where mass ratio of the sepiolite, the carbon material and the solvent is about 0-0.2:1:1-100. The humidity sensitive layer is made of silicon dioxide, silicon nitride and silicon oxynitride. USE - Humidity sensor based on sepiolite modified carbon material. ADVANTAGE - The humidity sensor has wide humidity detection range (0-95 relative humidity (RH)), low-humidity response (2% RH) and high resolution (2% RH). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing humidity sensor, which involves (A) mixing uniformly the carbon material and solvent to obtain dispersed carbon material solution; (B) mixing sepiolite with carbon material solution to obtain sepiolite modified carbon material solution; (C) coating the sepiolite modified carbon material solution on the substrate containing the interdigital electrode to form a humidity sensitive layer; (D) placing the substrate with humidity sensitive layer in the 20-100 to dry for 1-5 hours; and (E) obtaining the humidity sensor of sepiolite modified carbon material.