• 专利标题:   Depositing thin film, comprises preparing mixture of cyclohexanone and graphene oxide, supplying the mixture into chamber, and depositing thin film using plasma enhanced chemical vapor deposition by providing radio frequency power.
  • 专利号:   KR2022096100-A
  • 发明人:   YOON S Y, YOOK J, JAI L H, SHIM W P
  • 专利权人:   TES CO LTD
  • 国际专利分类:   C03C017/00, C23C016/26, C23C016/44, C23C016/505, G02B005/22
  • 专利详细信息:   KR2022096100-A 07 Jul 2022 C23C-016/505 202274 Pages: 8
  • 申请详细信息:   KR2022096100-A KR188242 30 Dec 2020
  • 优先权号:   KR188242

▎ 摘  要

NOVELTY - The method involves preparing a mixture of 90-99.9 wt.% cyclohexanone and 0.1-10 wt.% graphene oxide (S110). The mixture is vaporized and supplied to a chamber (S130). A thin film is deposited using plasma enhanced chemical vapor deposition (PECVD) by providing radio frequency (RF) power (S150), where the temperature inside the chamber is 100-200° C. A gap is formed between a showerhead and a heater in the chamber. Temperature, pressure and flow rate of the graphene oxide are adjusted by the RF power. The method further comprises supplying nitrous oxide to the chamber. USE - The method is useful for depositing thin film. ADVANTAGE - The method maximizes light absorption rate in visible light region when thin film is deposited by supplying graphene oxide as raw material gas. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for depositing thin film (Drawing includes non-English language text). S110Preparing a mixture of cyclohexanone and graphene oxide S130Vaporizing mixture and supplying to a chamber S150Depositing thin film using PECVD by providing RF power