• 专利标题:   Graphene-carbon nanotube FET device processing method, involves removing graphene nano-electrode from cutting system for placing graphene nano-electrode on circular sample platform, and manufacturing graphene-carbon nanotube FET device.
  • 专利号:   CN109052317-A
  • 发明人:   XIE S, QIN L, WANG Y, YUAN G, KONG Z, LI G, CHEN F, CAO S, ZHAO Z, DAI K
  • 专利权人:   UNIV PINGDINGSHAN
  • 国际专利分类:   B82Y040/00, H01L029/40, H01L029/772
  • 专利详细信息:   CN109052317-A 21 Dec 2018 B82Y-040/00 201913 Pages: 15 Chinese
  • 申请详细信息:   CN109052317-A CN10877768 03 Aug 2018
  • 优先权号:   CN10877768

▎ 摘  要

NOVELTY - The method involves assembling a graphene sheet on a cutting processing system. Cutting force setting operation is performed in a cutting system. The cutting system is started for cutting a graphene nanometer belt. A graphene nano-electrode is processed. A single-wall carbon nano-tube stress model is established in a non uniform electric field. The graphene nano-electrode is removed from the cutting system for placing the graphene nano-electrode on a circular sample platform. A graphene-carbon nanotube FET device is manufactured. USE - Graphene-carbon nanotube FET device processing method. ADVANTAGE - The method enables increasing processing precision and performing processing operation in a simple and flexible manner. The method enables reducing processing cost. The method enables detecting biomolecules in micro environment with high sensitivity. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a graphene-carbon nanotube FET device.